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by Iyer, Subramanian S.

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Title Statements

  • Full title :<>.

Edition Statements

  • Publication Date:©2002.

Publication Statements

The Physical Object

  • Description:xxv, 149 pages : : illustrations ; : 26 cm.

Edition Identifiers

  • ISBN:0852960395, 9780852960394
  • oclc:ocn956771619
  • LC Classification:TK7871.85

Subjects

Circuits intégrés à très grande échelle Integrated circuits -- Very large scale… Micro-Electrical-Mechanical Systems Microelectromechanical systems Microsystèmes électromécaniques Silicium sur isolant Silicon-on-insulator technology

Writers

Iyer, Subramanian S.

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