Atomic Layer Processing: Semiconductor Dry Etching Technology

Atomic Layer Processing: Semiconductor Dry Etching Technology

by Lill, Thorsten

Type Book
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Title Statements

  • Full title :Atomic Layer Processing: Semiconductor Dry Etching Technology

Edition Statements

  • Publication Date:2021.

Publication Statements

  • Publisher(s):Wiley-VCH
  • Place of Publication:Newark, GERMANY
  • Language:eng
  • Publication Date:2021.

The Physical Object

  • Description:1 ressource en ligne (301)

Edition Identifiers

  • ISBN:3527346686, 9783527346684, 3527824200, 9783527824205, 9783527824182, 3527824189
  • oclc:on1248718944
  • LC Classification:TK7871.85
  • Dewey Decimal:621.4

Subjects

e-books Livres numériques

Writers

Lill, Thorsten

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