Beyond-CMOS Nanodevices 1

Beyond-CMOS Nanodevices 1

by Balestra, Francis

Type Book
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This book offers a comprehensive review of the state-of-the-art in innovative Beyond-CMOS nanodevices for developing novel functionalities, logic and memories dedicated to researchers, engineers and students. It particularly focuses on the interest of nanostructures and nanodevices (nanowires, small slope switches, 2D layers, nanostructured materials, etc.) for advanced More than Moore (RF-nanosensors-energy harvesters, on-chip electronic cooling, etc.) and Beyond-CMOS logic and memories applic…

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Title Statements

  • Full title :Beyond-CMOS Nanodevices 1 / edited by Francis Balestra.

Summary

This book offers a comprehensive review of the state-of-the-art in innovative Beyond-CMOS nanodevices for developing novel functionalities, logic and memories dedicated to researchers, engineers and students. It particularly focuses on the interest of nanostructures and nanodevices (nanowires, small slope switches, 2D layers, nanostructured materials, etc.) for advanced More than Moore (RF-nanosensors-energy harvesters, on-chip electronic cooling, etc.) and Beyond-CMOS logic and memories applications.

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Edition Statements

  • Publication Date:2014.

Publication Statements

  • Publisher(s):ISTE, Wiley
  • Place of Publication:London
  • Language:eng
  • Publication Date:2014.

Notes

6.2.3. MEMS piezoelectric vibration energy harvesting transducers.

The Physical Object

  • Description:1 online resource (xix, 495 pages)

Edition Identifiers

  • ISBN:9781118984796, 111898479X, 9781118984857, 1118984854, 9781118984772, 1118984773, 1848216548, 9781848216549
  • oclc:ocn881417015
  • LC Classification:TK7871.99.M44
  • Dewey Decimal:621.381

Table of Contents

Cover; Title Page; Copyright; Contents; Acknowledgments; General Introduction; Part 1. Silion Nanowire Biochemical Sensors; Part 1. Introduction; Chapter 1. Fabrication Of Nanowires; 1.1. Introduction; 1.2. Silicon nanowire fabrication with electron beam lithography; 1.2.1. Key requirements; 1.2.2. Why electron beam lithography?; 1.2.3. Lithographic requirements; 1.2.4. Tools, resist materials and development processes; 1.2.5. Exposure strategies and proximity effect correction; 1.2.6. Technology limitations and how to circumvent them.

1.3. Silicon nanowire fabrication with sidewall transfer lithography1.4. Si nanonet fabrication; 1.4.1. Si NWs fabrication; 1.4.2. Si nanonet assembling; 1.4.3. Si nanonet morphology and properties; 1.5. Acknowledgments; 1.6. Bibliography; Chapter 2. Functionalization Of Si-Based NW FETs For DNA Detection; 2.1. Introduction; 2.2. Functionalization process; 2.3. Functionalization of Si nanonets for DNA biosensing; 2.3.1. Detection of DNA hybridization on the Si nanonet by fluorescence microscopy; 2.3.2. Preliminary electrical characterizations of NW networks.

2.4. Functionalization of SiC nanowire-based sensor for electrical DNA biosensing2.4.1. Si…

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