Capacitive silicon resonators

Capacitive silicon resonators: performance enhancement methods

by Toan, Nguyen Van

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Title Statements

  • Full title :Capacitive silicon resonators : performance enhancement methods / authored by Nguyen Van Toan and Takahito Ono.

Edition Statements

  • Publication Date:cop. 2020.

Publication Statements

The Physical Object

  • Description:XIII, 161 str. : : ilustr. ; : 25 cm.

Edition Identifiers

  • ISBN:9780367217761, 0367217767, 9780429266010, 0429266014
  • oclc:on1130849650
  • Dewey Decimal:621.3815

Subjects

Dielectric resonators Electric resonators elektrotehnika Nanoelectromechanical systems Nanosystèmes électromécaniques Résonateurs diélectriques Résonateurs électriques Semi-conducteurs semiconductor Semiconductors

Writers

Toan, Nguyen Van Ono, Takahito

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