Chemistry in microelectronics

by Le Tiec, Yannick

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Title Statements

Full title :Chemistry in microelectronics / edited by Yannick Le Tiec.

Edition Statements

Publication Date:2013.

Publication Statements

Publisher(s):ISTE, Wiley
Place of Publication:London
Language:eng
Publication Date:2013.

The Physical Object

Description:xii, 372 pages : : illustrations (black and white) ; : 24 cm.

Edition Identifiers

ISBN:9781848214361, 1848214367
oclc:ocn830024535
LC Classification:TK7874
Dewey Decimal:621.381

Chemistry in th "front end of the line" (FEOL) : deposits, gate stacks, epitaxy and contacts / François Martin, Jean-Michel Hartmann, Véronique Carron and Yannick Le Tiec -- Chemistry in interconnects / Vincent Jousseaume, Paul-Henri Haumesser, Carole Pernel, Jeffery Butterbaugh, Sylvain Maîtrejean and Didier Louis -- The chemistry of wet surface preparation : cleaning, etching and drying / Yannick Le Tiec and Martin Knotter -- The use and management of chemical fluids in microelectronics / Christiane Gottschalk, Kevin McLaughlin, Julie Cren, Catherine Peyne and Patrick Valenti -- Surface functionalization for micro- and nanosystems : application to biosensors / Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier-Nogues and Francoise Vinet.