CVD Precursors

CVD Precursors

by Fischer, Roland A.

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Title Statements

  • Full title :CVD Precursors.

Edition Statements

  • Publication Date:2005.
  • Edition:1. Aufl

Publication Statements

The Physical Object

  • Description:213 Seiten : : Illustrationen, Diagramme ; : 24 cm.

Edition Identifiers

  • ISBN:3540016058, 9783540016052
  • oclc:ocn249222649
  • LC Classification:QD411.7.S94
  • Dewey Decimal:547.05

Subjects

Atomschichtepitaxie -- Ausgangsmaterial Chemical vapor deposition CVD-Verfahren -- Aufsatzsammlung. -- Au… Metal organic chemical vapor deposition Nanopartikel -- Epitaxie Organometallic chemistry organometallic compounds

Writers

Fischer, Roland A.

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