Digital holography for MEMS and microsystem metrology

Digital holography for MEMS and microsystem metrology

by Asundi, Anand

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Title Statements

  • Full title :Digital holography for MEMS and microsystem metrology / edited by Anand Asundi.

Edition Statements

  • Publication Date:2011.

Publication Statements

  • Publisher(s):Wiley
  • Place of Publication:Chichester
  • Language:eng
  • Publication Date:2011.

Notes

dawsonera.

The Physical Object

  • Description:1 v.

Edition Identifiers

  • ISBN:9780470978696, 0470978694, 9781119997306, 1119997305
  • oclc:on1204822828
  • LC Classification:TK7875
  • Dewey Decimal:621.381

Subjects

digital imaging Essais holographiques Holographic testing Image processing -- Digital techniques Microelectromechanical systems -- Measu… Microelectronics -- Measurement Traitement d'images -- Techniques numér…

Writers

Asundi, Anand

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