Digital holography for MEMS and microsystem metrology

Digital holography for MEMS and microsystem metrology

by Asundi, Anand

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Title Statements

  • Full title :Digital holography for MEMS and microsystem metrology / edited by Anand Asundi

Edition Statements

  • Publication Date:2011

Publication Statements

  • Publisher(s):Wiley
  • Place of Publication:Chichester, West Sussex, U.K
  • Language:eng
  • Publication Date:2011

The Physical Object

  • Description:Online-Ressource (xxii, 205 p) : ill., port

Edition Identifiers

  • ISBN:9780470978696, 0470978694, 9781119972792, 1119972795, 9781119997290, 1119997291
  • oclc:ocn839025075
  • LC Classification:TK7875
  • Dewey Decimal:621.381

Subjects

digital imaging Essais holographiques Holographic testing Image processing -- Digital techniques Microelectromechanical systems -- Measu… Microelectronics -- Measurement Traitement d'images -- Techniques numér…

Writers

Asundi, Anand

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