EUV lithography

EUV lithography

by Bakshi, Vivek

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Title Statements

  • Full title :EUV lithography / Vivek Bakshi, editor.

Edition Statements

  • Publication Date:©2017
  • Edition:Second edition

Publication Statements

  • Publisher(s):SPIE Press
  • Place of Publication:Bellingham, Washington
  • Language:eng
  • Publication Date:©2017

The Physical Object

  • Description:1 online resource

Edition Identifiers

  • ISBN:9781510616790, 1510616799
  • oclc:on1029872449
  • LC Classification:QC459
  • Dewey Decimal:621.3815

Subjects

Optical coatings PHOTOLITHOGRAPHIE PHOTOLITHOGRAPHY Rayonnement ultraviolet -- Applications… Revêtements optiques TECHNOLOGY & ENGINEERING -- Mechanical Ultraviolet radiation -- Industrial app…

Writers

Bakshi, Vivek

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  • Euv Lithography -- (.pdf)

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