Fundamentals of microfabrication and nanotechnology

Fundamentals of microfabrication and nanotechnology

by Madou, Marc J.

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Title Statements

  • Full title :Fundamentals of microfabrication and nanotechnology / Marc J. Madou.

Edition Statements

  • Publication Date:©2012.
  • Edition:3rd ed

Publication Statements

  • Publisher(s):CRC
  • Place of Publication:Boca Raton, Fla
  • Language:eng
  • Publication Date:©2012.

Notes

Revised edition of: Fundamentals of microfabrication. 2002.

The Physical Object

  • Description:3 v. : : illustrations ; : 29 cm

Edition Identifiers

  • ISBN:9780849331800, 0849331803, 9781420055115, 1420055119, 9781420055191, 1420055194, 9781420055160, 142005516X
  • oclc:ocn804672046

Table of Contents

Conté: v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications.

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Subjects

Circuits integrats -- Projectes i const… Microelectrónica

Writers

Madou, Marc J. Madou, Marc J.

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