Handbook of plasma processing technology: fundamentals, etching, deposition, and surface interaction

Title Statements

• Full title :Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interaction / ed. by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood.

Edition Statements

• Publication Date:1990.

Publication Statements

• Publisher(s):Noyes Publ
• Place of Publication:Westwood
• Language:eng
• Publication Date:1990.

The Physical Object

• Description:XXII, 523 s. : : il. ; : 24 cm.

Edition Identifiers

• ISBN:0815512201, 9780815512202
• oclc:ocn750539235

Subjects

Writers

More from this Series

• Handbook of VLSI microlithography

  ©2001.

  more →

  

• Handbook of VLSI microlithography

  2001.

  more →

  

• Handbook of VLSI microlithography

  2001.

  more →

  

• Handbook of VLSI microlithography

  2001.

  more →

  

• Handbook of VLSI microlithography

  ©2001.

  more →