High density plasma sources

High density plasma sources: design, physics and performance

by Popov, Oleg A.

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Title Statements

  • Full title :High density plasma sources : design, physics and performance.

Edition Statements

  • Publication Date:1995.

Publication Statements

  • Publisher(s):Noyes
  • Place of Publication:Park Ridge
  • Language:eng
  • Publication Date:1995.

The Physical Object

  • Description:1 online resource (445 blz.)

Edition Identifiers

  • ISBN:0815513771, 9780815513773, 1591240638, 9781591240631
  • oclc:ocn839558569

Writers

Popov, Oleg A.

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