Integrated microsystems: materials, MEMs, photonics, bio interfaces

Title Statements

• Full title :Integrated microsystems : materials, MEMs, photonics, bio interfaces / edited by Krzysztof Iniewski.

Edition Statements

• Publication Date:2011.

Publication Statements

• Publisher(s):CRC, Taylor & Francis [distributor]
• Place of Publication:Boca Raton, Fla
• Language:eng
• Publication Date:2011.

The Physical Object

• Description:1 volume : : illustrations.

Edition Identifiers

• ISBN:9781439836200, 1439836205
• oclc:ocn752479837
• Dewey Decimal:621.381

Subjects

Writers

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