Title Statements
- Full title :Ion implantation / ed. by J.K. Hirvonen.
Edition Statements
- Publication Date:1980.
Publication Statements
- Publisher(s):Academic Press
- Place of Publication:New York
- Language:eng
- Publication Date:1980.
The Physical Object
- Description:1 vol. (XIV-502 p.) : : ill. ; : 24 cm.
Edition Identifiers
- ISBN:0123418186, 9780123418180
- oclc:ocn489806454
- LC Classification:TA403
- Dewey Decimal:620.1/1/08 s
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