Ion implantation

Ion implantation

by Hirvonen, James Karsten

Type Book
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Title Statements

  • Full title :Ion implantation / ed. by J.K. Hirvonen.

Edition Statements

  • Publication Date:1980.

Publication Statements

  • Publisher(s):Academic Press
  • Place of Publication:New York
  • Language:eng
  • Publication Date:1980.

The Physical Object

  • Description:1 vol. (XIV-502 p.) : : ill. ; : 24 cm.

Edition Identifiers

  • ISBN:0123418186, 9780123418180
  • oclc:ocn489806454
  • LC Classification:TA403
  • Dewey Decimal:620.1/1/08 s

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