Materials and process characterization

Materials and process characterization

by Einspruch, Norman G.

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Title Statements

  • Full title :Materials and process characterization / ed. by Norman G. Einspruch, Graydon B. Larrabee.

Edition Statements

  • Publication Date:1983.

Publication Statements

  • Publisher(s):Academic Press
  • Place of Publication:New York
  • Language:eng
  • Publication Date:1983.

The Physical Object

  • Description:XII, 601 Seiten ; : Illustrationen. : 24 cm :

Edition Identifiers

  • ISBN:0122341066, 9780122341069
  • oclc:ocn635804099

Subjects

HALBLEITER + HALBLEITERTECHNOLOGIE (ELE… HÖCHSTINTEGRIERTE SCHALTUNGEN, VLSI (MI… INTÉGRATION À TRÈS GRANDE ÉCHELLE, VLSI… SEMI-CONDUCTEURS + TECHNOLOGIE DES SEMI… SEMICONDUCTORS + SEMICONDUCTOR TECHNOLO… VERY LARGE SCALE INTEGRATED CIRCUITS, V…

Writers

Einspruch, Norman G.

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