Micro mechanical systems

Micro mechanical systems: principles and technology

by Fukuda, T. Menz, W.

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Title Statements

  • Full title :Micro mechanical systems : principles and technology

Edition Statements

  • Publication Date:1998

Publication Statements

  • Publisher(s):Elsevier
  • Place of Publication:Amsterdam
  • Language:eng
  • Publication Date:1998

The Physical Object

  • Description:268 s

Edition Identifiers

  • ISBN:0444823638, 9780444823632
  • oclc:ocn474584831

Writers

Fukuda, T. Menz, W.

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