Title Statements
- Full title :Micro mechanical systems : principles and technology / edited by T. Fukuda and W. Menz.
Edition Statements
- Publication Date:1998.
Publication Statements
- Publisher(s):Elsevier
- Place of Publication:Amsterdam
- Language:eng
- Publication Date:1998.
The Physical Object
- Description:1 online resource (viii, 268 p. :) : ill.
Edition Identifiers
- ISBN:0444823638, 9780444823632
- oclc:on1340083058
- LC Classification:TJ163
- Dewey Decimal:621
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