Micro mechanical systems

Micro mechanical systems: principles and technology

by Fukuda, Toshio Menz, W.

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Title Statements

  • Full title :Micro mechanical systems : principles and technology / ed. by T. Fukuda and W. Menz.

Edition Statements

  • Publication Date:1998.

Publication Statements

  • Publisher(s):Elsevier
  • Place of Publication:Amsterdam
  • Language:eng
  • Publication Date:1998.

The Physical Object

  • Description:VIII, 268 s. : : il. ; : 25 cm.

Edition Identifiers

  • ISBN:0444823638, 9780444823632
  • oclc:ocn750552690

Subjects

mikroelektronika Mikromechanika

Writers

Fukuda, Toshio Menz, W.

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