Micro mechanical systems

Micro mechanical systems: principles and technology

by Fukuda, T., (Toshio) Menz, W., (Wolfgang)

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Title Statements

  • Full title :Micro mechanical systems : principles and technology / edited by T. Fukuda and W. Menz.

Edition Statements

  • Publication Date:1998.

Publication Statements

  • Publisher(s):Elsevier
  • Place of Publication:Amsterdam
  • Language:eng
  • Publication Date:1998.

The Physical Object

  • Description:viii, 268 pages : : illustrations ; : 25 cm.

Edition Identifiers

  • ISBN:0444823638, 9780444823632
  • oclc:on1030055930
  • LC Classification:TJ163
  • Dewey Decimal:621

Subjects

Handbooks and manuals Microelectromechanical systems Microelectromechanical systems -- Handb… Microsystèmes électromécaniques -- Guid…

Writers

Fukuda, T., (Toshio) Menz, W., (Wolfgang)

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