Title Statements
- Full title :Micro process engineering / ed. by Volker Hessel ...
Edition Statements
- Publication Date:2009
Publication Statements
- Publisher(s):Wiley-VCH-Verl
- Place of Publication:Weinheim
- Language:eng
- Publication Date:2009
The Physical Object
- Description:XXII, 493 S. : Ill., graph. Darst.
Edition Identifiers
- ISBN:9783527315505, 3527315500
- oclc:ocn391205189
- Dewey Decimal:660
Subjects
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