Microelectronic failure analysis

Microelectronic failure analysis: desk reference : 2001 supplement

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Title Statements

  • Full title :Microelectronic failure analysis : desk reference : 2001 supplement / prepared under the direction of the Electronic Device Failure Analysis Society Publications Committee.

Edition Statements

  • Publication Date:©2001.

Publication Statements

  • Publisher(s):ASM International
  • Place of Publication:Materials Park, OH
  • Language:eng
  • Publication Date:©2001.

The Physical Object

  • Description:1 online resource (v, 171 pages) : : illustrations

Edition Identifiers

  • ISBN:9781615032655, 1615032657
  • oclc:ocn647829197
  • LC Classification:TK7871
  • Dewey Decimal:621.381

Table of Contents

Preface -- Contents -- Focused Ion Beam Backside Isolation Techniques -- Package/Sample Cross Sectioning -- Copper Deprocessing -- Atomic Force Microscopy, Scanning Probe Microscopy, and Scanning Capacitance Microscopy -- Supplementary Information

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