Title Statements
- Full title :Microelectronic failure analysis : desk reference : 2001 supplement / prepared under the direction of the Electronic Device Failure Analysis Society Publications Committee.
Edition Statements
- Publication Date:©2001.
Publication Statements
- Publisher(s):ASM International
- Place of Publication:Materials Park, OH
- Language:eng
- Publication Date:©2001.
The Physical Object
- Description:1 online resource (v, 171 pages) : : illustrations
Edition Identifiers
- ISBN:9781615032655, 1615032657
- oclc:ocn647829197
- LC Classification:TK7871
- Dewey Decimal:621.381
Table of Contents
Preface -- Contents -- Focused Ion Beam Backside Isolation Techniques -- Package/Sample Cross Sectioning -- Copper Deprocessing -- Atomic Force Microscopy, Scanning Probe Microscopy, and Scanning Capacitance Microscopy -- Supplementary Information
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