Title Statements
- Full title :Microelectronics failure analysis : desk reference / edited by Richard J. Ross.
Edition Statements
- Publication Date:c2011.
- Edition:6th ed
Publication Statements
- Publisher(s):ASM International
- Place of Publication:Materials Park, Ohio
- Language:eng
- Publication Date:c2011.
The Physical Object
- Description:xi, 660 p. : : ill.
Edition Identifiers
- ISBN:9781615037261, 1615037268
- oclc:on1261939960
- LC Classification:TK7871
- Dewey Decimal:621.381
Table of Contents
Section 1. Introduction -- section 2. Failure analysis process overviews -- section 3. Failure analysis topics -- section 4. Fault verification and classification -- section 5. Localization techniques -- section 6. Deprocessing and sample preparation -- section 7. Inspection -- section 8. Materials analysis -- section 9. Focused ion beam applications -- section 10. Management and reference information.
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