Microelectronics processing

Microelectronics processing: chemical engineering aspects

by Hess, Dennis W.

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Title Statements

  • Full title :Microelectronics processing : chemical engineering aspects / Dennis W. Hess ...

Edition Statements

  • Publication Date:1989.

Publication Statements

  • Publisher(s):American Chem. Soc
  • Place of Publication:Washington, DC
  • Language:und
  • Publication Date:1989.

The Physical Object

  • Description:XIV, 547 Seiten : : Illustrationen.

Edition Identifiers

  • ISBN:0841214751, 9780841214750
  • oclc:ocn230997944

Subjects

Mikroelektronikindustrie

Writers

Hess, Dennis W.

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