Microelectronics processing: chemical engineering aspects

Title Statements

• Full title :Microelectronics processing : chemical engineering aspects / Dennis W. Hess editor, Klavs F. Jensen editor.

Edition Statements

• Publication Date:1989.

Publication Statements

• Publisher(s):American Chemical Society
• Place of Publication:Washington, D.C
• Language:eng
• Publication Date:1989.

The Physical Object

• Description:XIV, 547 p. : : illustrations, graf. ; : 24 cm

Edition Identifiers

• ISBN:0841214751, 9780841214750
• oclc:ocn797425702
• Dewey Decimal:621.381

Subjects

Writers

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