Microelectronics processing

Microelectronics processing: chemical engineering aspects

by Hess, Dennis W. Jensen, Klavs F.

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Title Statements

  • Full title :Microelectronics processing : chemical engineering aspects / Dennis W. Hess, editor, Klavs F. Jensen, editor.

Edition Statements

  • Publication Date:1989.

Publication Statements

The Physical Object

  • Description:XIV, 547 p. ; : 24 cm.

Edition Identifiers

  • ISBN:0841214751, 9780841214750
  • oclc:ocn804385588

Subjects

Circuits integrats Microelectrònica -- Materials Química de superfícies

Writers

Hess, Dennis W. Jensen, Klavs F.

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