Microlithography: science and technology

by Smith, Bruce W. Suzuki, Kazuaki

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Title Statements

Full title :Microlithography : science and technology / edited by Bruce W. Smith and Kazuaki Suzuki.

Edition Statements

Publication Date:2020
Edition:Third edition

Publication Statements

Publisher(s):CRC Press
Place of Publication:Boca Raton
Language:eng
Publication Date:2020

The Physical Object

Description:1 online resource

Edition Identifiers

ISBN:9781315117171, 1315117177, 9781439876763, 1439876762, 9781351633949, 1351633945, 9781351643443, 1351643444
oclc:on1226113435
Dewey Decimal:621.3815/31

Subjects

Circuits intégrés -- Masques Electronic books Fabrication Integrated circuits / Masks manufacturing Manufacturing processes Metal oxide semiconductors, Complementa… Microlithographie -- Applications indus… Microlithography -- Industrial applicat… TECHNOLOGY / Electronics / Microelectro… TECHNOLOGY / Electronics / Microelectro… TECHNOLOGY / Lasers TECHNOLOGY / Lasers ; bisacsh