Microlithography: science and technology

Title Statements

• Full title :Microlithography : science and technology / edited by Kazuaki Suzuki and Bruce W. Smith.

Edition Statements

• Publication Date:2013.
• Edition:3rd ed

Publication Statements

• Publisher(s):CRC, Taylor & Francis [distributor]
• Place of Publication:Boca Raton, Fla
• Language:eng
• Publication Date:2013.

The Physical Object

• Description:1 online resource : ill.

Edition Identifiers

• ISBN:9781351643443, 1351643444
• oclc:on1289831121

Writers