Nanofabrication using focused ion and electron beams

Nanofabrication using focused ion and electron beams: principles and applications

by Moshkalev, Stanislav Russell, Phillip Utke, Ivo

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Title Statements

  • Full title :Nanofabrication using focused ion and electron beams : principles and applications / edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell.

Edition Statements

  • Publication Date:2012.

Publication Statements

The Physical Object

  • Description:xvi, 813 pages : : illustrations ; : 27 cm.

Edition Identifiers

  • ISBN:9780199734214, 0199734216
  • oclc:ocn707267321
  • LC Classification:TA418.9.N35
  • Dewey Decimal:620.1/15

Table of Contents

Machine generated contents note:

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Subjects

Bombardement ionique -- Applications in… Electron beams -- Industrial applicatio… Faisceaux électroniques -- Applications… Ion bombardment -- Industrial applicati… Nanomatériaux Nanostructured Materials nanotechnology

Writers

Moshkalev, Stanislav Russell, Phillip Utke, Ivo

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