Nanofabrication using focused ion and electron beams: principles and applications

by Moshkalev, Stanislav Russell, Phillip Utke, Ivo

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Title Statements

  • Full title :Nanofabrication using focused ion and electron beams : principles and applications / edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell.

Edition Statements

  • Publication Date:2011.

Publication Statements

The Physical Object

  • Description:1 online resource (xvi, 813) p.

Edition Identifiers

  • oclc:on1158917460
  • LC Classification:TA418.9.N35
  • Dewey Decimal:620.1/15

Subjects

Bombardement ionique -- Applications in… Electron beams -- Industrial applicatio… Faisceaux électroniques -- Applications… Ion bombardment -- Industrial applicati… Nanomatériaux Nanostructured Materials Nanostructures nanotechnology

Writers

Moshkalev, Stanislav Russell, Phillip Utke, Ivo

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