Nanofabrication using focused ion and electron beams

Nanofabrication using focused ion and electron beams: principles and applications

by Utke, Ivo

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Title Statements

  • Full title :Nanofabrication using focused ion and electron beams : principles and applications / ed. by Ivo Utke [und weitere].

Edition Statements

  • Publication Date:2012.

Publication Statements

The Physical Object

  • Description:813 Seiten : : Illustrationen.

Edition Identifiers

  • ISBN:9780199734214, 0199734216
  • oclc:ocn796754494
  • Dewey Decimal:620.115

Subjects

AUFSATZSAMMLUNGEN (DOKUMENTENTYP) Bombardement ionique -- Applications in… COLLECTIONS D'ARTICLES ET D'ESSAIS (TYP… COLLECTIONS OF ESSAYS (TYPE OF DOCUMENT) Electron beams -- Industrial applicatio… ELECTRON-BEAM MACHINING, MACHINING USIN… ELEKTRONENSTRAHLBEARBEITUNG (SPANENDE U… Faisceaux électroniques -- Applications… Ion bombardment -- Industrial applicati… ION SPUTTERING (ELECTRODYNAMICS) IONENSPUTTERING (ELEKTRODYNAMIK) MATÉRIAUX NANOSTRUCTURÉS (PHYSIQUE DE L… Nanomatériaux Nanostructured Materials NANOSTRUCTURED MATERIALS (CONDENSED MAT… NANOSTRUKTURIERTE MATERIALIEN (PHYSIK D… nanotechnology PULVÉRISATION IONIQUE (ÉLECTRODYNAMIQUE) USINAGE AU MOYEN PAR FAISCEAUX D'ÉLECTR…

Writers

Utke, Ivo

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