Optical materials: microstructuring surfaces with off-electrode plasma

"This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed."--Provided by publisher

Cover ; Half Title ; Title ; Copyright ; Contents; Foreword; Preface; Authors; Chapter 1 Forming Directed Fluxes of Low-Temperature Plasma with High-Voltage Gas Discharge outside the Electrode Gap; 1.1 Overview of Devices Used for Generating Low-Temperature High-Voltage Gas-Discharge Plasma; 1.2 Features of Low-Temperature Off-Electrode Plasma Generated by High-Voltage Gas Discharge; 1.3 Design Changes to the High-Voltage Gas- Discharge Device; 1.4 New Devices for Generating Directed Fluxes of Low-Temperature Off-Electrode Plasma; 1.4.1 Multibeam Gas-Discharge Plasma Generator.

1.4.2 Gas-Discharge Plasma Focuser1.5 Chapter Summary; Chapter 2 Methods for Quickly Measuring Surface Cleanliness; 2.1 Overview of Methods for Quickly Measuring Surface Cleanliness; 2.1.1 Method of Frustrated Multiple Internal Reflection Spectroscopy; 2.1.2 Method of Measuring the Volta Potential; 2.1.3 Methods for Evaluating Cleaning Efficiency Based on Wettability of the Substrate Surface; 2.1.4 Tribometric Method; 2.2 Design Changes to the Tribometer; 2.3 Operating Regimes and Parameters of the Tribometer; 2.4 Determining the Evaluation Criterion of a Technologically Clean Surface.

2.5 Tribometric Eff…