Optical scattering: measurement and analysis
As the authoritative resource on optical scattering, this book was developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. Dr. Stover covers scattering beginning with its basics and covering surface roughness calculations, measurements, instrumentation, predictions, specifications, and industrial applications. Also included are appendices that review the basics of wave propagation and Kirchhoff diffraction. Whether you're an optical engineer cu…
Read More ↓Title Statements
- Full title :Optical scattering : measurement and analysis / John C. Stover.
Summary
As the authoritative resource on optical scattering, this book was developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. Dr. Stover covers scattering beginning with its basics and covering surface roughness calculations, measurements, instrumentation, predictions, specifications, and industrial applications. Also included are appendices that review the basics of wave propagation and Kirchhoff diffraction. Whether you're an optical engineer currently investigating roughness-induced haze in the semiconductor industry, or just entering the field of scatter metrology, this text will be invaluable.
Read More ↓Edition Statements
- Publication Date:©1995.
- Edition:2nd ed
Publication Statements
- Publisher(s):SPIE Optical Engineering Press
- Place of Publication:Bellingham, Wash., USA
- Language:eng
- Publication Date:©1995.
The Physical Object
- Description:1 online resource (xiii, 321 pages) : : illustrations
Edition Identifiers
- ISBN:9781615837397, 1615837396, 9780819419347, 0819419346, 9780819478443, 081947844X
- DOI:10.1117/3.203079
- oclc:ocn695027107
- LC Classification:QC427.4
- Dewey Decimal:535/.4
Table of Contents
Chapter 1. Introduction to light scatter: 1.1 The scattering of light -- 1.2 Scatter from a smooth sinusoidal surface -- 1.3 Scatter from other surfaces -- 1.4 Scatter from windows and particulates -- 1.5 Bidirectional scatter distribution functions -- 1.6 Total integrated scatter -- 1.7 Summary.
Chapter 2. Surface roughness: 2.1 Profile characterization -- 2.2 The surface power spectral-- Density and autocovariance functions -- 2.3 Summary.
Chapter 3. Scatter calculations and diffraction theory: 3.1. Overview -- 3.2. Kirchhoff diffraction theory -- 3.3. The Rayleigh approach -- 3.4. Comparison of vector and scalar results -- 3.5. Summary.
Chapter 4. Calculation of smooth-surface statistics from the BRDF: 4.1. Practical application of the Rayleigh-Rice perturbation theory -- 4.2. Roughness statistics of isotropic surfaces -- 4.3. Roughness statistics of one-dimensional surfaces -- 4.4. Roughness statistics for the general case -- 4.5. The K-correlation surface power spectrum models -- 4.6. The TIS derivation from the Rayleigh-Rice perturbation theory -- 4.7. Summary.
Chapter 5. Polarization of scattered light: 5.1. A review of polarization concepts -- 5.2. The polarization fac…
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