Plasma Etching for CMOS Devices Realization

Title Statements

• Full title :Plasma Etching for CMOS Devices Realization.

Summary

Edition Statements

• Publication Date:Jan. 2017

Publication Statements

• Publisher(s):Elsevier Science & Technology Books [distributor], ISTE Press Limited - Elsevier Incorporated
• Place of Publication:Saint Louis
• Language:eng
• Publication Date:Jan. 2017

The Physical Object

• Description:1 online resource (136 pages)

Edition Identifiers

• ISBN:1785480960, 9781785480966
• oclc:on1066671865
• LC Classification:TK7871.99.M44
• Dewey Decimal:621.39732

Writers