Title Statements
- Full title :Plasma etching processes for CMOS device realization / Nicolas Posseme [aut]
Edition Statements
- Publication Date:2017
Publication Statements
- Publisher(s):ISTE Press :Elsevier
- Place of Publication:London, UK :Kidlington, Oxford, UK
- Language:eng
- Publication Date:2017
The Physical Object
- Description:1 online resource
Edition Identifiers
- ISBN:9780081011966, 0081011962
- oclc:on1281884629
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