Plasma etching processes for CMOS device realization

Plasma etching processes for CMOS device realization

by Posseme, Nicolas

Type Book
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Title Statements

  • Full title :Plasma etching processes for CMOS device realization / Nicolas Posseme [aut]

Edition Statements

  • Publication Date:2017

Publication Statements

  • Publisher(s):ISTE Press :Elsevier
  • Place of Publication:London, UK :Kidlington, Oxford, UK
  • Language:eng
  • Publication Date:2017

The Physical Object

  • Description:1 online resource

Edition Identifiers

  • ISBN:9780081011966, 0081011962
  • oclc:on1281884629

Writers

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