Plasma etching processes for cmos devices realization
by Posseme, Nicolas (cea-leti, Grenoble, France)
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Title Statements
- Full title :Plasma etching processes for cmos devices realization.
Edition Statements
- Publication Date:2017
Publication Statements
- Publisher(s):ISTE Press Ltd ;Elsevier Inc
- Language:eng
- Publication Date:2017
The Physical Object
- Description:136 sidor ; : 16 cm
Edition Identifiers
- ISBN:9781785480966, 1785480960
- oclc:on1023291271
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