Title Statements
- Full title :Plasma processes for semiconductor fabrication / W.N.G. Hitchon.
Edition Statements
- Publication Date:1999.
Publication Statements
- Publisher(s):Cambridge University Press
- Place of Publication:Cambridge
- Language:eng
- Publication Date:1999.
The Physical Object
- Description:Online-Ressource.
Edition Identifiers
- ISBN:0521591759, 9780521591751, 9780521018005, 0521018005, 9780511529511, 0511529511
- DOI:10.1017/CBO9780511529511
- oclc:ocn849941431
- LC Classification:TK7871.85
- Dewey Decimal:621.3815/2
Subjects
Writers
More from this Series
No reviews yet. Be the first to rate this work.
Related Works
more →
Materials processing handbook
0.0
Type: Book
Semiconductor nanowires I: growth and theory
0.0
Type: Book
Light-induced defects in semiconductors
0.0
Type: Book
Advanced high speed devices
0.0
Type: Book
Semiconductor gas sensors
0.0
Type: Book
Electronic states and optical transitions in semiconductor heterostructures
Vasko, Fedor T.
0.0
Type: Book
Semiconductor optics
0.0
Type: Book
Compound semiconductor bulk materials and characterizations
0.0
Type: Book
Graphene nanoelectronics: from materials to circuits
0.0
Type: Book
Trap level spectroscopy in amorphous semiconductors
0.0
Type: Book
Materials for high-temperature semiconductor devices
0.0
Type: Book
Files & Downloads
-
Plasma processes for semiconductor fabrication --…
DJVU · 2.6 MB · updated -
Plasma Processes for Semiconductor Fabrication --…
DJVU · 2.1 MB · updated -
Plasma Processes for Semiconductor Fabrication --…
DJVU · 1.7 MB · updated -
Plasma Processes for Semiconductor Fabrication --…
PDF · 12.8 MB · updated -
Plasma processes for semiconductor fabrication --…
PDF · 12.8 MB · updated
Rate & Review