Polymers in microlithography: materials and processes

by Iwayanagi, Takao MacDonald, Scott A. Reichmanis, Elsa

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Title Statements

  • Full title :Polymers in microlithography : materials and processes / Elsa Reichmanis, editor, Scott A. MacDonald, editor, Takao Iwayanagi, editor.

Edition Statements

  • Publication Date:1989.

Publication Statements

Notes

"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989."

The Physical Object

  • Description:1 online resource (xii, 449 pages : : illustrations).

Edition Identifiers

  • oclc:on1319419517
  • LC Classification:TK7871.15.P6
  • Dewey Decimal:621.381/531

Subjects

Conference papers and proceedings Microlithography -- Materials Photoresists Photoresists -- Congresses Polymers Polymers -- Congresses

Writers

Iwayanagi, Takao MacDonald, Scott A. Reichmanis, Elsa

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