Polymers in microlithography: materials and processes
by Iwayanagi, Takao MacDonald, Scott A. Reichmanis, Elsa
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Title Statements
- Full title :Polymers in microlithography : materials and processes / ElsaReichmanis, Scott A. MacDonald, Takao Iwayanagi.
Edition Statements
- Publication Date:1989.
Publication Statements
- Publisher(s):American Chemical Society
- Place of Publication:Washington, D.C
- Language:eng
- Publication Date:1989.
Notes
"Developed from a symposium sponsored by the Division of Polymeric Materials : Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989."
The Physical Object
- Description:449 pages
Edition Identifiers
- ISBN:0841217017, 9780841217010
- oclc:ocn423282042
- LC Classification:QD3A37V.412
- Dewey Decimal:621.381/531
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