Polymers in microlithography: materials and processes
by Iwayanagi, Takao MacDonald, Scott A. Reichmanis, Elsa
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Title Statements
- Full title :Polymers in microlithography : materials and processes / Elsa Reichmanis, editor, Scott A. McDonald, editor, Takao Iwayanagi, editor.
Edition Statements
- Publication Date:1989.
Publication Statements
- Publisher(s):ACS
- Place of Publication:Washington, D.C
- Language:eng
- Publication Date:1989.
Notes
Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering ... Dallas, Texas, April 9-14, 1989.
The Physical Object
- Description:xii, 449 s.
Edition Identifiers
- ISBN:0841217017, 9780841217010
- oclc:ocn924841412
- Dewey Decimal:621.381 531
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