Polymers in microlithography: materials and processes

by Iwayanagi, Takao MacDonald, Scott A. Reichmanis, Elsa

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Title Statements

  • Full title :Polymers in microlithography : materials and processes / Elsa Reichmanis, Scott A. MacDonald, Takao Iwayanagi.

Edition Statements

  • Publication Date:1989.

Publication Statements

Notes

Titre de l'écran-titre (visionné le 1er octobre 2010).

In ACS publications.

Developed from a symposium sponsored by the Division of Polymeric Materials : Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989.

The Physical Object

  • Description:1 ressource en ligne (xii, 449) : : illustrations, fichiers PDF

Edition Identifiers

  • oclc:on1132186847
  • Dewey Decimal:621.381/531

Subjects

Actes de congrès Conference papers and proceedings Congress Microlithographie -- Congrès. -- Matéri… Microlithography -- Congresses. -- Mate… Microlithography -- Materials Photoresists Photoresists -- Congresses Polymères -- Congrès Polymers Polymers -- Congresses Résines photosensibles -- Congrès

Writers

Iwayanagi, Takao MacDonald, Scott A. Reichmanis, Elsa

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