Polymers in microlithography

Polymers in microlithography: materials and processes

by Reichmanis, Elsa

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Title Statements

  • Full title :Polymers in microlithography : materials and processes / Elsa Reichmanis, Scott A. MacDonald, Takao Iwayanagi.

Edition Statements

  • Publication Date:1989.

Publication Statements

Notes

A la portada: " Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989."

The Physical Object

  • Description:449 p. ; : 24 cm.

Edition Identifiers

  • ISBN:0841217017, 9780841217010
  • oclc:ocn804385526

Subjects

Congressos Congressos i conferències Microlitografia -- Congressos Polímers

Writers

Reichmanis, Elsa

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