Polymers in microlithography: materials and processes
by Iwayanagi, Takao MacDonald, Scott A. Reichmanis, Elsa
Type
Book
Rate
0.0 /5
Title Statements
- Full title :Polymers in microlithography : materials and processes / Elsa Reichmanis, editor, Scott A. MacDonald, editor, Takao Iwayanagi, editor.
Edition Statements
- Publication Date:1989.
Publication Statements
- Publisher(s):American Chemical Society
- Place of Publication:Washington, DC
- Language:eng
- Publication Date:1989.
Notes
"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989."
The Physical Object
- Description:xii, 449 pages : : illustrations ; : 24 cm.
Edition Identifiers
- ISBN:0841217017, 9780841217010
- oclc:ocn809538832
- LC Classification:TK7871.15.P6
- Dewey Decimal:621.381/531
Subjects
Writers
More from this Series
No reviews yet. Be the first to rate this work.
Related Works
more →
Aulularia
0.0
Type: Book
Epidicus
0.0
Type: Book
Zircon
0.0
Type: Book
Zircon
0.0
Type: Book
Principles of distributed systems: 7th international conference, OPODIS 20…
OPODIS (Conference), Martinique)
0.0
Type: Book
Principles of distributed systems: 7th international conference, OPODIS 20…
OPODIS (Conference), Martinique)
0.0
Type: Book
Principles of distributed systems: 7th international conference, OPODIS 20…
OPODIS 2003:, Martinique)
0.0
Type: Book
Principles of distributed systems: 7th international conference, OPODIS 20…
International Conference on Principles of Distributed Systems, French West Indies, MQ)
0.0
Type: Book
Principles of distributed systems: 7th international conference, OPODIS 20…
OPODIS 2003:, Martinique)
0.0
Type: Book
Files & Downloads
-
Polymers in Microlithography. Materials and Proce…
PDF · 8.0 MB · updated -
Polymers in Microlithography.. Materials and Proc…
DJVU · 5.0 MB · updated
Rate & Review