Principles of plasma discharge for materials processing

Principles of plasma discharge for materials processing

by Lieberman, M. A.

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Title Statements

  • Full title :Principles of plasma discharge for materials processing / Michael A. Lieberman, Allan J. Lichtenberg.

Edition Statements

  • Publication Date:©1994.

Publication Statements

  • Publisher(s):John Wiley & Sons
  • Place of Publication:New York
  • Language:eng
  • Publication Date:©1994.

The Physical Object

  • Description:[544] pages ; : 23 cm

Edition Identifiers

  • ISBN:0471005770, 9780471005773
  • oclc:ocn877715933
  • Dewey Decimal:621.044

Writers

Lieberman, M. A. Lichtenberg, Allan J.

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