Resolution enhancement techniques in optical lithography

Resolution enhancement techniques in optical lithography

by Wong, Alfred Kwok-kit

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Title Statements

  • Full title :Resolution enhancement techniques in optical lithography / Alfred Kwok-kit Wong.

Edition Statements

  • Publication Date:©2001.

Publication Statements

  • Publisher(s):SPIE Press
  • Place of Publication:Bellingham
  • Language:eng
  • Publication Date:©2001.

The Physical Object

  • Description:XVII, 214 p. ; : 26 cm

Edition Identifiers

  • ISBN:0819439959, 9780819439956
  • oclc:ocn807460378
  • LC Classification:TK7874

Subjects

Circuits integrats -- Disseny Microlitografia

Writers

Wong, Alfred Kwok-kit

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