Title Statements
- Full title :Semiconductor manufacturing technology / Chue San Yoo.
Edition Statements
- Publication Date:2008.
Publication Statements
- Publisher(s):World Scientific Pub
- Place of Publication:Singapore
- Language:eng
- Publication Date:2008.
The Physical Object
- Description:xii, 470p. : : ill. ; : 23cm.
Edition Identifiers
- ISBN:9812568239, 9789812568236
- oclc:on1198547719
- LC Classification:TK7836
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