Title Statements
- Full title :Semiconductor manufacturing technology / Chue San Yoo.
Edition Statements
- Publication Date:2008.
Publication Statements
- Publisher(s):World Scientific
- Place of Publication:New Jersey
- Language:eng
- Publication Date:2008.
The Physical Object
- Description:XII, 470 Seiten : : Illustrationen, Diagramme.
Edition Identifiers
- ISBN:9789812568236, 9812568239
- oclc:ocn254613636
- LC Classification:TK7871.85
- Dewey Decimal:621.38152
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