Title Statements
- Full title :Silicon processing for the VLSI era. / Stanley Wolf, Richard N. Tauber.
Edition Statements
- Publication Date:2000.
- Edition:2nd ed
Publication Statements
- Publisher(s):Lattice Press
- Place of Publication:Suset Beach, California
- Language:eng
- Publication Date:2000.
The Physical Object
- Description:890 p. ; : 24 cm
Edition Identifiers
- ISBN:0961672161, 9780961672164
- oclc:ocn637173129
Subjects
Writers
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