Silicon processing for the VLSI era

Silicon processing for the VLSI era

by Wolf, Stanley

Type Book
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Title Statements

  • Full title :Silicon processing for the VLSI era. / Stanley Wolf, Richard N. Tauber.

Edition Statements

  • Publication Date:©2000.
  • Edition:2. ed

Publication Statements

  • Publisher(s):Lattice Press
  • Place of Publication:Sunset Beach
  • Language:eng
  • Publication Date:©2000.

The Physical Object

  • Description:XXXVI, 890 p. ; : 25 cm

Edition Identifiers

  • ISBN:0961672161, 9780961672164
  • oclc:ocn889138411

Writers

Wolf, Stanley Tauber, Richard N.

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