Silicon processing for the VLSI era

Silicon processing for the VLSI era

by Wolf, Stanley

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Title Statements

  • Full title :Silicon processing for the VLSI era / Stanley Wolf, Richard N. Tauber.

Edition Statements

  • Publication Date:c2000.
  • Edition:2. ed

Publication Statements

  • Publisher(s):Lattice Press
  • Place of Publication:Sunset beach, Calif
  • Language:eng
  • Publication Date:c2000.

The Physical Object

  • Description:4 v. : ill. : 25 cm

Edition Identifiers

  • ISBN:0961672161, 9780961672164
  • oclc:on1352565440
  • Dewey Decimal:621.395

Table of Contents

1 : Process technology. -- 2002. -- XXXVI, 890 p.

2 : Process integration. -- XXXI, 753 p.

3 : The submicron MOSFET. -- XXII, 722 p.

4 : Deep-submicron process technology. -- XXII, 806 p.

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Subjects

Circuiti integrati Silicio - Impiego in microelettronica

Writers

Wolf, Stanley Tauber, Richard N.

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