Smart sensors and MEMS: intelligent devices and microsystems for industrial applications
by Luque, Antonio Nihtianov, Stoyan
Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion and memory functions. This book outlines industrial applications for smart sensors and smart MEMS; covers smart sensors including capacitive, inductive, resistive and magnetic sensors and sensors to…
Read More ↓Title Statements
- Full title :Smart sensors and MEMS : intelligent devices and microsystems for industrial applications / [edited by] Stoyan Nihtianov, Antonio Luque.
Summary
Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion and memory functions. This book outlines industrial applications for smart sensors and smart MEMS; covers smart sensors including capacitive, inductive, resistive and magnetic sensors and sensors to detect radiation and measure temperature; discusses smart MEMS including power MEMS, radio frequency MEMS, optical MEMS, inertial MEMS, and microreaction chambers. --
Read More ↓Edition Statements
- Publication Date:2014.
Publication Statements
- Publisher(s):Woodhead Publishing Limited
- Place of Publication:Sawston, Cambridge, UK
- Language:eng
- Publication Date:2014.
Notes
Titre de l'écran-titre (visionné le 11 nov. 2015).
TRAITEMENT SOMMAIRE.
The Physical Object
- Description:1 ressource en ligne (538 p.).
Edition Identifiers
- ISBN:9780857099297, 0857099299
- oclc:ocn931004794
- LC Classification:TA165
- Dewey Decimal:681.2
Table of Contents
Part I. Smart sensors for industrial applications -- What makes sensor devices and microsystems 'intelligent' or 'smart'? / R. Taymanov and K. Sapozhnikova -- Direct interface circuits for sensors / F. Reverter -- Capacitive sensors for displacement measurement in the sub-nanometer range / S. Xia and S. Nihtianov -- Integrated inductive displacement sensors for harsh industrial environments / M.R. Nabavi -- Advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and the extreme ultraviolet (EUV) spectral range / A. Gottwald and F. Scholze -- Integrated polarization analyzing CMOS image sensors for detection and signal processing / M. Sarkar and A.J.P. Theuwissen -- Advanced interfaces for resistive sensors / A. Flammini and A. Depari -- Reconfigurable ultrasonic smart sensor platform for nondestructive evaluation and imaging applications / J. Sanie, E. Oruklu and S. Gilliland -- Advanced optical incremental sensors: encoders and interferometers / S.J.A.G. Cosijns and M.J. Jansen -- Part II. Smart micro-electro-mechanical systems (MEMS) for industrial applications -- Microfabrication technologies used for creating smart devices for industrial applications / J.M. Quero,…
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